Recipe Manager and Editor (RME)

Incorrectly used recipes in the wafer fabrication process lead to millions of dollars in losses every year because of the need to scrap improperly processed lots. Synopsys’ Recipe Manager and Editor (RME)™ product is a wafer fabrication, process-tool-independent solution, which enables customers to centrally manage process recipes. RME can reduce scrap, enhance yield and improve engineering productivity. Its patented universal off-line editing module, using recipe document object model (RDOM) technology, allows engineers to edit process recipes from anywhere on a corporate intranet without sacrificing security or taking the tool off-line.

RME Reduces Wafer Scrap

RME provides a secure, reliable and efficient method of managing and editing recipes off-line, increasing tool time availability as well as allowing APC systems to programmatically modify recipes at download time.

Features Summary

• Universal off-line editor enables process engineers to create or modify process recipes at their desks, increasing productivity, equipment uptime and reducing engineering efforts in learning editing systems
• Recipe parameter history, parameter change notification, and audit trial enables trace back and analysis of recipe problems
• E-mail based recipe approval system provides an efficient method to proceed through the sign-off loop and eliminates scrapped lots due to incorrect recipes
• Correlation of yield to recipe history enables APC solutions and improves yield

Single Editor Supports Most Process Equipment