One of CATS' most popular optional features is Jobdeck Viewing. With fast, accurate, graphical support for MEBES™, JEOL™, Hitachi™ and Toshiba™ E-beam systems, CATS' Jobdeck Viewing provides the visual and analytical tools necessary to verify complex jobdecks. The user may display photomask outlines and titles, as well as pattern borders, pattern data, or both. Combined with very high-speed drawing algorithms and comprehensive color, fill-code and line-style control, these features provide the industry-standard tool set for jobdeck analysis, troubleshooting and verification.

Two jobdecks may be input simultaneously and overlaid, further adding to the verification and troubleshooting capabilities. Jobdecks may be scaled and offset relative to one another to ensure proper overlay. This option provides also for the overlay of additional verification patterns to ensure accurate placement of patterns relative to cassette clamps, pellicle frames, etc.

For Etec exposure tools, users may define the model of the E-beam or laser tool to be used and appropriate adjustments are made to the display. MPARAM files may also be used to optimize the drawing for a specific machine.

Since CATS graphical capabilities are completely integrated across format and product types, a user who knows CATS basic graphics already knows 99% of CATS Jobdeck Viewing.

See Also:
CATS Jobdeck Smashing
CATS Jobdeck Editing