TCAD
Calibration Library

The Calibration Library consists of a large selection of SIMS profiles from Applied Materials, Inc. and Varian Semiconductor Equipment Associates, Inc., giving customers a fast, accurate, and reliable method of evaluating and optimizing process conditions. These SIMS databases can be used to calibrate process model parameters and as inputs to certain simulation steps, providing a predictive analysis of the influence of process equipment parameters on electrical device data. In addition, the Calibration Library helps process engineers to understand the sensitivity of processes to various control parameters, enabling them to optimize equipment operation quickly.

Benefits

• Calibrated and predictive TCAD for manufacturing
• Fast and inexpensive analysis and optimization of process technology
• Elimination of lengthy system operations and numerous test wafers