TCAD
Sentaurus Workbench Advanced

The Advanced option available in the Sentaurus Workbench includes optimization and calibration features. The Optimizer is an analysis tool designed for parametric studies in large-scale projects with hundred of individual simulators. It can be used for iterative optimization, sensitivity analysis and uncertainty analysis. The Calibration Kit assists users to perform efficient SIMS calibration of the process simulators Sentaurus Process, TSUPREM-4, and Dios to specific process conditions for increased accuracy and predictability. It serves as a SIMS database browser as well as a simulation and project manager.

Benefits

• Comprehensive support for design-of-experiments and response surface modeling.
• Convenient graphical user interface for sensitivity and uncertainty analysis.
• Link to SIMS databases such as the Calibration Library.
• Versatile calibration environment for process simulators.
• Fast and inexpensive analysis and optimization of process technology.