Application-driven optimizations of metal stack and PDN (power delivery network) using machine learning framework
27 February 2024 • 4:10 PM - 4:30 PM PST | Convention Center, Room 210C
Advances in full-chip three-dimensional resist modeling for low k1 EUV and DUV lithography
29 February 2024 • 8:40 AM - 9:00 AM PST | Convention Center, Room 210C
Advancing the curvilinear ILT and OPC ecosystem for low-k1 DUV and EUV lithography
29 February 2024 • 2:55 PM - 3:20 PM PST | Convention Center, Room 210C
Simulating use of displacement talbot lithography for high volume AR waveguide manufacturing
29 February 2024 • 3:20 PM - 3:45 PM PST | Convention Center, Room 210C